Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ITOH Hitoshi and NATA Akiko,Gas Phase Condensation Reaction and Surface Morphology of Low-k Dielectrics by the (CH_3)_4Si and Oxygen Radical Mixuture,Technical report of IEICE. SDM,,"The Institute of Electronics, Information and Communication Engineers",1999-01-22,98,555,19-26,https://cir.nii.ac.jp/crid/1573668927228305280,