著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
LIU A. Q.,Low-loss lateral micromachined switch for high frequency applications,J. Micromech. Microeng.,,,2005,15,,157-167,https://cir.nii.ac.jp/crid/1573950400146677504,