Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Minamiyama Takayuki and Kumagae Akitoshi and Sato Kazuo and Ito Shin-ichi and Nakase Makoto,KrF Excimer Laser Process: Lateral and Surface Modification for Enhancing Resist Contrast,Japanese Journal of Applied Physics,,The Japan Society of Applied Physics,1992,31,6,1928-1932,https://cir.nii.ac.jp/crid/1573950402131040256,