著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Minamiyama Takayuki and Kumagae Akitoshi and Sato Kazuo and Ito Shin-ichi and Nakase Makoto,KrF Excimer Laser Process: Lateral and Surface Modification for Enhancing Resist Contrast,Japanese Journal of Applied Physics,,社団法人応用物理学会,1992,31,6,1928-1932,https://cir.nii.ac.jp/crid/1573950402131040256,