Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
PATTERSON P. R.,A MEMS 2-D scanner iwth bonded single-crystalline honeycomb micromirror,Solid-State Sensor and Actuator Workshop(Hilton Head 2000),,,2000,,,,https://cir.nii.ac.jp/crid/1574231874297500672,