著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
NISHIZAKIA Shogo,Comparison of aSi TFTs fabricated by Cat-CVD and PECVD methods,Thin Solid Films,,,2009,517,,3581-3583,https://cir.nii.ac.jp/crid/1574231874778048512,