Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SUNG Min Gyu and LIM Kwan-Yong and CHO Heung-Jae and LEE Seung Ryong and JANG Se-Aug and KIM Yong Soo and JOO Moon-Sig and LEE Ju-Hee and KIM Tae-Yoon and YANG Hong-Seon and PYI Seung-Ho and KIM Jin Woong,Diffusion Barrier Characteristics of TiSix/TiN for Tungsten Dual Poly Gate in DRAM,Extended abstracts of the ... Conference on Solid State Devices and Materials,,,2006-09-13,2006,,136-137,https://cir.nii.ac.jp/crid/1574231875369564032,