著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
LAPISA M.,"Wafer level heterogeneous integration for MOEMS, MEMS, and NEMS",IEEE Journal of Selected Topics in Quantum Electronics,,,2011,17,,629-644,https://cir.nii.ac.jp/crid/1574231876218429312,