Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) LEGTENBERG Rob,An Electrostatic Lower Stator Axial-Gap Polysilicon Wobble Motor Part I : Design and Modeling,Journal of MEMS,,,1998,7,1,79-86,https://cir.nii.ac.jp/crid/1574231876445538560,