Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
MATSUHASHI Hideki and LEE Chang-Hun and MASU Kazuya and TSUBOUCHI Kazuo,Comparison of metalorganic source gases for Al CVD process : DMAH v.s. DMEAA,Technical report of IEICE. SDM,,"The Institute of Electronics, Information and Communication Engineers",1997-08-25,97,239,67-71,https://cir.nii.ac.jp/crid/1574231877186411392,