Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Masanori Okuyama and Kaoru Yamashita and H. Murakami and Seiji Aoyagi and Y. Suzuki and T. Fukunaga,Ultrasonic micro array sensor using piezoelectric PZT thin film and resonant frequency tuning by poling,"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.",,IEEE,2003-12-22,,,487-490,https://cir.nii.ac.jp/crid/1870020692776036992,https://doi.org/10.1109/isaf.2002.1195974