著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Takashiro Tsukamoto and Shuji Tanaka and Masayoshi Esashi,A micro thermal switch with a stiffness-enhanced thermal isolation structure,Journal of Micromechanics and Microengineering,0960-1317,IOP Publishing,2011-09-29,21,,104008,https://cir.nii.ac.jp/crid/1870020692842239232,https://doi.org/10.1088/0960-1317/21/10/104008