著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
H. Yoshinari and K. Tomioka and Noriaki Matsunaga and Hideki Shibata,Damascene process induced charging damage phenomenon,Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247),,IEEE,2003-01-20,,,276-278,https://cir.nii.ac.jp/crid/1870020692843341824,https://doi.org/10.1109/iitc.1999.787143