著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
T. Meguro and K. Yamanouchi,Multilevel interconnection and electrode separation technology using anodic oxidation and application to unidirectional surface acoustic wave transducers,Seventh International IEEE Conference on VLSI Multilevel Interconnection,,IEEE,2002-12-04,,,380,https://cir.nii.ac.jp/crid/1870020693205211648,https://doi.org/10.1109/vmic.1990.127904