著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
S. Kaku and Masahiko Naoe and T. Hirata,Properties of Aluminum Thin Films Prepared by Targets Facing Type of Sputtering System,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1985-01-01,58,,,https://cir.nii.ac.jp/crid/1870020693366897024,https://doi.org/10.1557/proc-58-305