Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
M. Sumiya and M. Kawasaki and J. Kochika and H. Koinuma,Fabrication of Highly Stable and Low Deffect Density Amorphous Silicon Films at Low Substrate Temperature by Plasma CVD Assisted with Piezoelectric Vibration,,,,2006-11-30,,,,https://cir.nii.ac.jp/crid/1870021791622489344,