Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Sadao Maeda and Kenji Ebihara,Pulsed Inductive Plasma Processing for Amorphous Thin Film Formation,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1987-01-01,98,,,https://cir.nii.ac.jp/crid/1870302167679895040,https://doi.org/10.1557/proc-98-249