Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masashi Ikeda and Mitsugu Hanabusa,Wavelength-Dependent Area Selectivity in Photochemical Vapor Deposition of Aluminum Films,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1989-01-01,158,,,https://cir.nii.ac.jp/crid/1870302167810705280,https://doi.org/10.1557/proc-158-135