著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kazuhiro Hane and F. Nakai and Minoru Sasaki and Xiaoyu Mi,Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer,IEEE/LEOS International Conference on Optical MEMs,,IEEE,2003-06-25,,,25-26,https://cir.nii.ac.jp/crid/1870302167863635072,https://doi.org/10.1109/omems.2002.1031426