著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Taizoh Sadoh and S. Matsuo and Hiroshi Nakashima and Toshio Tsurushima and M. Yamamoto and Katsuhiko Furukawa and Dawei Gao,ECR Plasma Oxidation: Dependence on Energy of Argon Ion,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1999-01-01,585,,,https://cir.nii.ac.jp/crid/1870302167935955712,https://doi.org/10.1557/proc-585-171