著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Chiharu Kimura and Daisuke Watanabe and Takashi Sugino and Naoki Ooi and Jeong Jong-Hyeon and Hidemitsu Aoki,Electrochemical Etching of Ru Film for Bevel Cleaning of BEOL,Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials,,The Japan Society of Applied Physics,2008-09-24,,,,https://cir.nii.ac.jp/crid/1870302167939736832,https://doi.org/10.7567/ssdm.2008.c-2-4