著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kousaku Shimizu and JianJun Zhang and Jeong-Woo Lee and Jun-ichi Hanna,Poly-SiGe TFTs Fabricated by Low Temperature Chemical Vapor Deposition at 450°C,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2001-01-01,686,,,https://cir.nii.ac.jp/crid/1870302167940407168,https://doi.org/10.1557/proc-686-a3.8