Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masayuki Sekimura and Koichi Suzumori and Toyomi Miyagawa and Akihiro Koga,Attachment/detachment electrostatic micro actuators for pan-tilt drive of a micro CCD camera,Proceedings of Ninth International Workshop on Micro Electromechanical Systems,,IEEE,2002-12-23,,,509-514,https://cir.nii.ac.jp/crid/1870302168224014720,https://doi.org/10.1109/memsys.1996.494034