著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Paul R. Besser and Isaac Lauer and Conal E. Murray and Christopher P. D'Emic and Kazuya Ohuchi and K. Ishimaru and J.J. Bucchignano and Ghavam G. Shahidi and John Bruley and J.O. Chu and Bin Yang and Paul M. Solomon and Michael J. Rooks and Dae-Gyu Park and Christian Lavoie and Anna W. Topol and Vijay Narayanan and Mukesh Khare and Lynne Gignac and Mariko Takayanagi and G.U. Singco and Francois Pagette,Extendibility of NiPt silicide to the 22-nm node CMOS technology,Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08),,IEEE,2008-05-01,,,150-153,https://cir.nii.ac.jp/crid/1870302168240062208,https://doi.org/10.1109/iwjt.2008.4540037