著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yu Arai and Hideo Horibe and Akihiko Kono and Yousuke Goto,Removal of SU-8 resists using hydrogen radicals generated by tungsten hot-wire catalyzer,SPIE Proceedings,0277-786X,SPIE,2012-03-29,8328,,83280R,https://cir.nii.ac.jp/crid/1870583642500583040,https://doi.org/10.1117/12.916033