Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Toshitsugu Ueda and Hiroshi Oigawa and Jing Ji and Meng Zhao,Application of a 2-D anisotropic etching simulator on perforated etching of quartz wafer,2011 IEEE SENSORS Proceedings,,IEEE,2011-10-01,,,1693-1696,https://cir.nii.ac.jp/crid/1870583643247003136,https://doi.org/10.1109/icsens.2011.6127322