著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Toru Tojo and Kiminobu Akeno and Akihiko Sekine and Ryoichi Hirano and Hiroyuki Nagahama,Mask blank particle inspection in vacuum environments,SPIE Proceedings,0277-786X,SPIE,2002-10-07,4902,,624,https://cir.nii.ac.jp/crid/1870865117553502208,https://doi.org/10.1117/12.467384