Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Akio Higo and K. Wada and Manabu Yasuda and Shuichi Noda and Seiji Samukawa,Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching,SPIE Proceedings,0277-786X,SPIE,2016-11-17,10027,,100270Q,https://cir.nii.ac.jp/crid/1870865117604164480,https://doi.org/10.1117/12.2247702