著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Shinfuku Nomura and Yutaroh Kimura and Hiromichi Toyota and Xia Zhu and Ryoya Shiraishi and Yukiharu Iwamoto,Effect of Amorphous Silicon Carbide Interlayer on Diamond-Like Carbon Film Structure and Film Hardness,Key Engineering Materials,1662-9795,"Trans Tech Publications, Ltd.",2019-10-24,825,,99-105,https://cir.nii.ac.jp/crid/1870865117650043648,https://doi.org/10.4028/www.scientific.net/kem.825.99