Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shinichi Imai and S. Odanaka and H. Umimoto,A 3-D BPSG flow simulation with temperature and impurity concentration dependent viscosity model,International Electron Devices Meeting 1991 [Technical Digest],,IEEE,2002-12-09,,,709-712,https://cir.nii.ac.jp/crid/1870865117684481664,https://doi.org/10.1109/iedm.1991.235324