Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masataka Murahara and D. Sasaki,Photo-Chemical Pattern Etching of Silicon-Carbide by Using Excimer Laser and Hydrogen Peroxide Solution,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2002-01-01,742,,,https://cir.nii.ac.jp/crid/1870865117693589632,https://doi.org/10.1557/proc-742-k5.15