Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Masayuki Nakao and Y. Hatamura and H. Sangu and K. Nagai and M. Hatakeyama and K. Ichiki and T. Sato and K. Koyano and T. Kobata,"Construction of 3-D micro structure by multi-face FAB, co-focus rotational robot and various mechanical tools","Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems",,IEEE,2002-12-17,,,297-302,https://cir.nii.ac.jp/crid/1870865117809394432,https://doi.org/10.1109/memsys.1994.555826