著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hiroshi Tsuji and Yasuhito Gotoh and Junzo Ishikawa and T. Amioka,Metal ion beam self-sputter deposition system,Review of Scientific Instruments,0034-6748,AIP Publishing,1996-05-01,67,,1996-1999,https://cir.nii.ac.jp/crid/1870865118150821504,https://doi.org/10.1063/1.1146957