著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) K. Matsumoto and Akihito Nakai and Isao Shimoyama,Three dimensional arrangement of sensors using development,2008 IEEE 21st International Conference on Micro Electro Mechanical Systems,1084-6999,IEEE,2008-01-01,,,832-835,https://cir.nii.ac.jp/crid/1871146592717697792,https://doi.org/10.1109/memsys.2008.4443785