Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Satoshi Yoshida and Yoshihiko Hirai and T. Konishi,Simulation of polymer deformation for various shaped patterns in thermal nano imprint lithography,Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference,,Japan Soc. of Appl. Phys,2004-04-23,,,344-345,https://cir.nii.ac.jp/crid/1871146592918162560,https://doi.org/10.1109/imnc.2003.1268787