Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
John Borland and Satoru Matsumoto and Yusuke Matsunaga and Masayasu Tanjyo and Siti Rahmah Aid,"Characterization of BF<inf>2</inf>, Ga and in dopants in Si for halo implantation",2013 13th International Workshop on Junction Technology (IWJT),,IEEE,2013-06-01,,,74-77,https://cir.nii.ac.jp/crid/1871428067541440128,https://doi.org/10.1109/iwjt.2013.6644509