著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masafumi Asano and Ilya Osherov and Limor Issacharoff and Koichi Wakamoto and Matthew Sendelbach and Oram Gedalia,Application of advanced hybrid metrology method to nanoimprint lithography,SPIE Proceedings,0277-786X,SPIE,2017-03-28,10145,,101451X,https://cir.nii.ac.jp/crid/1871428067602616448,https://doi.org/10.1117/12.2266577