Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yoshiaki Shimooka and Kyoichi Suguro and Tadashi Iijima,Amorphous Ti-Si-N Barrier Metal for Cu Metallization on Ulsis,MRS Proceedings,1946-4274,Springer Science and Business Media LLC,1994-01-01,355,,,https://cir.nii.ac.jp/crid/1871428067659640704,https://doi.org/10.1557/proc-355-459