著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Jun Takamatsu and Yuuji Fukudome and Kiminobu Akeno and Shusuke Yoshitake and Soichiro Mitsui and Hideo Kusakabe and Naoharu Shimomura and Munehiro Ogasawara and Toru Tojo and Hirotsugu Wada and Kiyoshi Hattori and Mitsuko Shimizu and Hitoshi Sunaoshi and Seiichi Tsuchiya and Shinsuke Nishimura,Stage tracking of a mask-scan EB mask writer test stand,SPIE Proceedings,0277-786X,SPIE,2002-03-11,4562,,503,https://cir.nii.ac.jp/crid/1871428067683936384,https://doi.org/10.1117/12.458327