Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Shoji Takeuchi and Yuichi Hiratsuka and Kaori Kuribayashi and T. Yamamura,Sequential parylene lift-off process for selective patterning of biological materials,2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS),,IEEE,2007-01-01,,,501-504,https://cir.nii.ac.jp/crid/1871428067754087680,https://doi.org/10.1109/memsys.2007.4433114