著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kiyoshi Hamaguchi and T. Kuwata and Akihiro Ikeda and Hisao Kuriyaki and Tsuyoshi Fujimura and Satoru Kajiwara and Hiroshi Ogi and Reiji Hattori and Yukinori Kuroki,Design and measurements of test element group wafer thinned to 10 μm for 3D system in package,Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516),,IEEE,2004-07-20,,,161-164,https://cir.nii.ac.jp/crid/1871428067943478400,https://doi.org/10.1109/icmts.2004.1309471