Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Koji Nakamae and Yoshihiro Midoh and Hiromu Fujioka,Boundary extraction in the SEM cross-section of LSI by multiple Gaussian filtering,SPIE Proceedings,0277-786X,SPIE,2004-12-16,5606,,169,https://cir.nii.ac.jp/crid/1871428067996975104,https://doi.org/10.1117/12.570988