Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yuuki Ishii and Tatsuhiko Higashiki and Kenichi Shiraishi and Takuya Kono and Shinichiro Nakagawa and Hirokazu Tanizaki and Tomoharu Fujiwara,Basic studies of overlay performance on immersion lithography tool,SPIE Proceedings,0277-786X,SPIE,2006-03-10,6154,,61540Q,https://cir.nii.ac.jp/crid/1871428068107035136,https://doi.org/10.1117/12.656306