著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hiroaki Saitoh and Takahito Ono and Masayoshi Esashi,Si nano-wire SPM probe grown by field evaporation with UHV STM,"Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots",,IEEE,2002-11-22,,,159-164,https://cir.nii.ac.jp/crid/1871428068138441344,https://doi.org/10.1109/memsys.1997.581792