著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Akinobu Teramoto and Akihiko Hiroe and Tadahiro Ohmi,High Performance Bottom Gate μc-Si TFT Fabricated by Microwave Plasma CVD,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2008-01-01,1066,,,https://cir.nii.ac.jp/crid/1871709542444143488,https://doi.org/10.1557/proc-1066-a13-04