Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Akihiro Egami and Naohiro Kudoh and Kenji Numajiri and Kuniaki Miura and Masataka Satoh and Shingo Miyagawa and Masami Shibagaki and Haga Shigetaka and Fumio Watanabe and Tomoyuki Suzuki and Akira Kumagai,Impact of EBAS annealing on sheet resistance reduction for Al-implanted 4H-SiC(0001),MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2006-01-01,911,,,https://cir.nii.ac.jp/crid/1871709542538025344,https://doi.org/10.1557/proc-0911-b11-02