著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Koji Matsuo and Kazunari Ishimaru and Hidemi Ishiuchi and Hiroshi Itokawa and Honguh Yoshinori and Kazuya Ohuchi and K. Adachi and Naoki Tamaoki and Takayuki Ito and H. Tsujii and Nobutoshi Aoki,Issues and Optimization of Millisecond Anneal Process for 45 nm node and beyond,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,2006-01-01,912,,,https://cir.nii.ac.jp/crid/1871709542930702336,https://doi.org/10.1557/proc-0912-c04-06