著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Takashi Fuyuki and Hiroyuki Matsunami and Tatsuru Shirafuji and Masahiro Yoshimoto,A-Si:H Deposited by Direct Photo-Cvd Using a Microwave-Excited Xe Lamp,MRS Proceedings,0272-9172,Springer Science and Business Media LLC,1990-01-01,192,,,https://cir.nii.ac.jp/crid/1871709542976379904,https://doi.org/10.1557/proc-192-505