Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
T. Obata and T. Nakamoto and K. Yamaguchi,Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker,MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530),,IEEE,2002-11-11,,,43-48,https://cir.nii.ac.jp/crid/1871709543013117312,https://doi.org/10.1109/mhs.2000.903287