Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Katsuya Okumura and K. Mitsutake and Tsunetoshi Arikado and Yuuichi Mikata,Agile fab concepts for cost effective and QTAT mini fab,2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203),,IEEE,2002-11-13,,,7-10,https://cir.nii.ac.jp/crid/1871991017630606592,https://doi.org/10.1109/issm.2001.962902