著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hiroki Yamamoto and Takahiro Kozawa and Seiichi Tagawa and Yoshihisa Arai and Kikuo Furukawa,Evaluation of hydroxyl derivatives for chemically amplified extreme ultraviolet resist,SPIE Proceedings,0277-786X,SPIE,2010-03-11,7639,,76391L,https://cir.nii.ac.jp/crid/1871991017682195328,https://doi.org/10.1117/12.846460